MEMS微波功率传感器的研究与进展

Research and Progress of MEMS Microwave Power Sensor

摘要: 介绍MEMS微波功率传感器的研究与发展,包括自加热式、间接加热式、插入式和电容式微波功率传感器.文中以共面波导(CPW)、负载电阻和热堆作为微波功率传感器的基本单元,对这些基本单元分别作了分析,并给出了这些基本单元和总体结构的性能指标,同时介绍了Si和G以s衬底上制备微波功率传感器的主要工艺.
- 微波功率 /
- 热堆 /
- 终端电阻 /
- 传感器
Abstract: This paper introduces the research and progress of the MEMS microwave power sensors, whose types include the self-heating type, the indirectly-heated type, the insertion type and the capacitive type. The coplanar waveguide transmission line, the terminal resistors and the thermopile are analysed, which are basic elements of the sensor. The performances and fabrications of the microwave power sensors are described, which are based on Si and GaAs processes.