射频微机电系统技术现状

Research Status of RF MEMS Technology

摘要: 较全面地介绍了 RF MEMS 器件、由 RF 器件构成的组件及应用系统,并给出了一些新的典型示例。通过比较 RF MEMS 器件与传统微波器件在性能、尺寸等各方面的差别,可以了解 RF MEMS 技术在相控阵雷达上运用的优势。

Abstract: RF MEMS(Rodio Frequency Micro-Electro-Mechanical System)devices,module and system made of RF MEMS devices are fully introduced in this paper.Some typical new illustrations are also given.The difference in performance and size of RF MEMS devices is compared with that of ordinary microwave devices,and the advantage of RF MEMS technolo- gy using in phased array antenna radar recently is realized.