Abstract: Along with the operation frequency extendability of antenna and application, more and more institutes aredeveloping to millimeter operation frequency antenna, even to sub-millimeter operation frequency antenna, so the measurementsystems become necessary equipments for this kinds of antennas measurement. How to build the shielding chamber, how tobuild the mechanical scanner system and RF sub-system, how to estimate the system performance, what is the performance ofthe exit millimeter/sub-millimeter measurement systems will be showed in this article for millimeter/sub-millimeter system building reference and look forward to supply some points of theory and actual engineering for reference on the similar systembuilding.