Abstract: Nowadays，substrate integrated waveguide（SIW）technology is widely used in microwave and millimeter-wave integrated circuits. In order to measure the scattering parameters of SIW component at W-band，it is necessary to develop the transition between WR-10 standard rectangular waveguide and SIW，because most of the W-band VNAs are standard rectangular waveguide based. In this paper，the probe-based transition between WR-10 waveguide and SIW is designed by using HFSS，and verified by experiment.The results show that the return loss is less than -10 dB in whole W-band of the back-to-back structure，and the insertion loss is less than 2 dB from 75 to 106 GHz.