Abstract: The complexity and integration of microwave integrated circuits continue to increase, and the feature line width is continuously decreasing. Non-destructive high-resolution microwave field near-field imaging technology is critical to the function and failure analysis of the chip. There is no mature technical route yet. In this paper, a solid-state quantum system based on diamond nitrogen vacancy(NV) color center is proposed as a sensing unit. By analyzing the quantum state evolution law of the spin state ground state spin in the resonant microwave(MW) field, the all-optical method is used to obtain the precise measurement of the microwave field. Build an optical imaging system, one imaging, to obtain the overall field distribution of the chip. This method is highly efficient and has very little interference to the near field. It is expected to provide a new solution for applications such as chip electromagnetic compatibility, microwave chip failure analysis and antenna near field distribution imaging.