Abstract: The E-band is an important frequency band in millimeter waves, and is also a band relatively lacking study in the current module research. The E-band can be tripled to the sub-millimeter wave band, and its 220 GHz is the atmospheric absorption window, which has very important research value. Based on this, this paper designs an E-band frequency multiplier and power amplifier module as a power source of tripler for 220 GHz terahertz transmitter. The input frequency and output frequency of the module are 11. 1-13. 34 GHz and 66. 6-80 GHz, respectively. Furthermore, the input power is 4-5 dBm, the output power is >18 dBm, the gain is >13 dB, and it also has good flatness of output power. The successful development of this module provides power source conditions for sub-millimeter wave transceiver modules.