Abstract: In this paper, a millimeter-wave filter is designed by using a silicon-based single-layer substrate integrated waveguide (SIW) structure for the development of 5G millimeter-wave wireless communication. Firstly, the structure parameters of the filter are calculated via theoretical analysis. Then the electromagnetic simulation software HFSS is utilized to simulate and optimize the filter structure to meet the requirements. A fifth order millimeter wave filter is designed. Its passband range is 24.25 -27.5 GHz, the relative bandwidth is 12.56%, the insertion loss at the center frequency is less than 1 dB, and the in band return loss is better than -16 dB. Finally, the filter is processed into a physical object using a MEMS process and its performance is tested. The size of the filter is 9.45 mm×4.8 mm×0.4 mm, which is achieving iniaturization requirements. It is shown that the simulation results of the MEMS millimeter wave filter are basically consistent with the test results.