Abstract: Microwave photonic chip is the basis of supporting the development of microwave photonics. However, no Microwave photonic chip is the basis of supporting the development of microwave photonics. However, no material can satisfy all the requirements of microwave photonic chip. Heterogeneous integration technologies offer an effective way to break through the material limit. It can combine advantages of different materials on a chip. The chip performance on function, size, weight and power are subsequently improved. In this paper, the primary techniques and developments of heterogeneous integration microwave photonics are introduced.