Abstract: With the popularization and application of GaN technology and the development of three-dimensional stacking technology, microsystems or T/ R modules become lighter and thinner and have higher power density. The faster modulation speed will enable the radar to obtain better transmission waveform and lower blind area. However, faster transmission modulation is easy to introduce interference in a small space. Starting from the generation mechanism of voltage overshoot, this paper studies and analyzes the factors of voltage overshoot and the influence of voltage overshoot on the system. To improve the system reliability, the 16-channel transceiver micro-system is tested to effectively reduce the interference level to below 1 V. It is measured in the experiment that these methods can limit the voltage overshoot.