Abstract: In recent years, millimeter wave has gradually become the core supporting technology for major engineering applications such as 5G/6G mobile communication, satellite communication, next-generation wireless Internet, intelligent transportation, guidance, radio astronomy, etc. , and terahertz has gradually become a research hotspot. Millimeter-wave and terahertz integrated circuits (chips) are the key to promoting the rapid evolution of various millimeter-wave terahertz application systems. In this paper, the research progress and related processes of millimeter-wave and terahertz integrated circuits are reviewed, and the performance characteristics of chips under different processes and their suitable application scenarios are analyzed.