射频MEMS膜开关的力学解析模型

    Analytical Modeling of Electrostatic Forces for RF-MEMS Membrane Switches

    • 摘要: MEMS开关以其固有的低功耗、低插损和低交叉调制损耗等特性 ,在微波领域表现出巨大的应用潜力。但是目前大部分的研究工作都集中在设计新型开关结构和开关制作工艺上 ,对开关力学模型的研究较少。本文根据材料力学 ,通过合理的假设和简化 ,推导出MEMS开关的静电力解析模型 ,并详细探讨开关阈值电压和开关几何尺寸及材料特性之间的关系。这对MEMS开关的设计有一定的指导意义

       

      Abstract: Micromechanical switches have demonstrated great potential at microwave frequencies due to their very low consumption, low cross modulation, and low insertion loss characteristics. Studies are concentrated on the design of novel structures and fabrication techniques. There is little work that has been done to describe their electrostatic forces modeling. In this paper, an analytical formulation of a membrane switch based on the mechanics of materials is conducted through reasonable assumption and simplification. Furthermore, the sensitivity of switching threshold voltage to switch geometry and material properties is discussed in detail. It would be valuable to design the MEMS switch.

       

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