Abstract: The terahertz-wave, located between sub-mm-wave and infrared ray, presents a broad application prospects include mass-data wireless communication, while the rapid progress on silicon-based technology provides process foundation for terahertz integrated circuits with small size, high-integration and low cost. An overview was made on the research progress of terahertz integrated circuits based on silicon-based technology, and the challenges and trend of terahertz integrated circuits based on silicon-based technologies also discussed.