The Technological Development of Integrated Vacuum Electron Devices

The Integrated Vacuum Electron Devices (IVED) can have an analogy concept to the integrated circuit, which aims to develop the miniaturized high power and broadband radiant sources toward the band of sub-millimeter and terahertz frequencies with high consistency by using plan high frequency structures, micro-fabrication and micro- fabrication technologies. Furthermore, it can overcome the fundamental scientific and technological difficulties of the traditional vacuum electron devices resulting from the reduction in size as the frequency increased. Therefore, The IVED has become a new and important direction for the research field of vacuum electronics. In this paper, the recent research works for the IVED in the world are introduced. Also, the key technologies of theory and mechanism, simulation and design, machining and assembling for the development of IVED are analyzed in detail, which may give important thought and novel method to develop such useful devices in our country.