3D Heterogeneous Integrated Low-pass Filter Based on LTCC

Low temperature co-fired ceramic (LTCC) technology is one of the key technologies in the application of radio frequency application, but LTCC technology with a single dielectric material faces performance limitations. Therefore, in this paper a research on 3D heterointegration technology based on LTCC is conducted. By adjusting technical schemes such as casting formula, heating speed, sintering temperature and holding time, a sintering behavior control, interface compatibility, and tissue performance control scheme for heteromatching co-firing is proposed. A stable and reliable LTCC integration process is developed, and the simulation design and 3D integration preparation methods for devices based on LTCC heterointegration are proposed. A LTCC heterostructure integrated low-pass filter with excellent co-firing interface and performance is fabricated for verification. The verification results show that the performance indicators and processability of the heterogeneous integration technology can meet the requirements for use, and it is expected to be widely applied.